提出了一種新型的基于全息光柵的CCD 位移傳感器,該系統(tǒng)利用CCD 分辨力高、像素均勻等特點,對干涉條紋的移動進行精確定位,而且全息光柵在測量過程中又具有不受光源波長的影響、適用光譜范圍寬等特點,實現(xiàn)了位移的自動精確測量。該系統(tǒng)具有一定的實用價值及應用前景。
關鍵詞:線陣CCD ; 全息光柵; 位移傳感器
Abstract :A kind of new CCD displacement sensor based on holographic grating is made. This system carry out accurate location to interfering stripe moving using high resolution capacity and resembles plain in color character2 istic of CCD ,moreover ,holographic grating have do not receive the wavelength of light source influence in mea2 suring course , suitable spectrum scope wide etc. characteristic ,the auto2accurate measure of displacement is real2 ized. This system has certain practical value and application prospect .
Key words :linear CCD ; holographic grating ; displacement sensor